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Shop By Title > F > Fabrication Engineering at the Micro and Nanoscale

Fabrication Engineering at the Micro and Nanoscale

Fabrication Engineering at the Micro and Nanoscale
Author(s) : Stephen A. Campbell
Publisher : Oxford University Press
Pub. Date : Sep 2007
Edition : 3rd
Format : Softcover
ISBN-10 : 0195320174
ISBN-13 : 9780195320176
IE ISBN : 0195320174 / 9780195320176
Subject(s) : Engineering / Math & Science
Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes.

The physics and chemistry of each process are introduced along with descriptions of the equipment used to carry out the processes. The text uses a popular commercial process simulation suite--the Silvaco AthenaRG set of codes--to provide meaningful examples of many of the basic processes including diffusion, oxidation, lithography, and deposition.

The book goes on to discuss the integration of these basic unit processes into various technologies, concentrating on CMOS transistors. The text breaks down the material into treatments on the concepts of process modules, thermal budget, advanced architectures, and the use of channel strain for improved performance.

This is a brand new International Edition. The cover may look different but the book content (in english) is the same with US Hardcover. Printed in original color on high quality paper. Everything is identical to US Edition.


Price : $37.00

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